Polymer
By Design News Staff -- Design News, June 22, 1998
Vespel(reg) SCP-5000 polymer is used in parts and shapes for semiconductor manufacturing, aerospace, and other fields. The SCP-500 parts retain physical integrity and mechanical properties during long-term exposure to aggressive gases and plasma. In clamp rings and other wafer-contact applications, SCP-5000's low coefficient of linear thermal expansion (CLTE) reduces potential for wafer damage.
DuPont, Vespel Marketing, Box 6100, Newark, DE 19714.
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