Vacuum positioning components

Latest and greatest offerings in the engineering marketplace

By Design News Staff -- Design News, February 16, 1998

The PCLM Series of vacuum positioning components is available in fully vacuum-qualified versions for in-chamber micropositioning of samples, targets, wafers, and other objects. The products are based on piezo-ceramic linear-motor technology which provides sub-micron resolution with long travels to greater than 300 mm and speeds to 150 mm/sec. The PCLM motors provide rapid step-and-settle yet produce no magnetic fields, making these products targeted for use in applications such as SEMs, ion beam milling, charged-particle lithography, and spectroscopy.

Anorad Corp., 110 Oser Ave., Hauppauge, NY 11788, FAX (516) 435-1612.

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